MEMS: Micro-Electromechanical Systems

MEMS stands for Micro-ElectroMechanical Systems. MEMS techniques allow both electronic circuits and mechanical devices to be manufactured on a silicon chip, similar to the process used for integrated circuits. This allows the construction of items such sensor chips with built-in electronics that are a fraction of the size that was previously possible. The photo below shows an optical displacement sensor built with MEMS that can be used as an accelerometer.

mems

Photo courtesy of Sandia National Laboratories, SUMMiTTM Technologyies, www.mems.sandia.gov

MEMS Products

Four devices using MEMS technology have been commercially successful for several years. These are:

* MEMS accelerometer chips used to trigger airbags
* MEMS mirror chips for use in projection screen TVs
* MEMS inkjet nozzles used in printers
* MEMS pressure sensors for medical applications

MEMS Products under Development

Check out some interesting new products and applications being developed using MEMS:

* Computer game controller using MEMS accelerometer.
* Programmable MEMS gyroscope with features that significantly lower the cost of integrating the gyroscope into industrial equipment.
* MEMS microphones that are smaller and more resistant to heat than conventional microphones.
* MEMS RF switches to reduce power losses in microwave applications.
* MEMS blood pressure sensor with wireless data transfer that can be implanted in patients.
* MEMS oscillators that are smaller and more integrated with electronics circuits than current quartz oscillators.